NovaSensor P330B Piezoresistive (PRT) Pressure Sensor Die offers the same superior stability and sensitivity as larger chips, but in an extremely small footprint for invasive applications where small size is critical. It has excellent measurement accuracy, which is ideal for demanding applications with restricted dimensional profiles, such as medical catheters and IC packages. NovaSensor’s proprietary SenStable® process provides excellent long-term stability and repeatability.
When excited witha DC voltage source, the P330B produces an mV output that is proportional to applied pressure. The P330B employs a half-bridge design, which requires two external resistors to complete a full-bridge configuration. Additional components may be added to calibrate the output of the sensor.
Cardiovascular
Respiratory
Intracranial
Urological/Rectal
Ablation
Body Cavity
Research
Extremely small size: 330 x 120 µm cross-section
Stable and accurate pressure measurement
Low power consumption
Absolute pressure sensing
Standard pressure range of 450 to 1050 mmHgA
4500 mmHgA burst pressure
Gold-bond pads metallization and gold-tin solder bumps
Parameter(Note 1,2)
Value
Unit
Comment
Notes
Values measured at room temperature unless noted with 2500-ohm resistors completing the bridge.
Pressure sensor performance can be affected by die mounting. Packaging stress should be minimized to achieve the specified performance.
Proof Pressure: The maximum pressure at which the sensor may be subjected as an uncommon event and for a short duration of time without permanent damage or performance degradation. If the Proof Pressure is exceeded, the die performance is no longer guaranteed.
Burst Pressure: The pressure at which permanent damage to the sensor may occur. Specification is for quasi-static pressure in an oil medium applied to the diaphragm side of the die.
Parameter is measured at the wafer-level 100% at room temperature, atmospheric pressure and 3V.
Symmetry is calculated as 2*(r1 – r2)/(r1 + r2), where r1 and r2 are two piezoresistors measured separately.
Parameters marked “Typical” are verified by testing samples from each wafer. TCR of sensor resistors only. TCR of bridge circuit will be affected by the resistor values completing the bridge.
Die is capable beyond this range with additional validation.
Die with protective layers has been successfully used in various medical and biological applications.
If the sensor is to be exposed to radiation, it is recommended to shield the die from radiation and implement auto-zeroing.
