P162 Medical Silicon Gage Pressure Sensor Die

Performance Parameters⁽¹⁾	Value⁽⁴⁾	Units	Notes
Notes Values measured at 0.6 mA and 71.6°F (22 °C) unless noted with 800 Ω resistor between +Out and –IN, and –Out and –IN. Die performance will vary depending on die attach material. The die attach material should be chosen to minimize package stress transmitted to the sensor die. Sensitivity at 100 mmHg. Extrapolated error at 300 mmHg by straight line through 0 and 100 mmHg pressure readings Topside pressure. Percent of the bridge resistor with the lowest value. Symmetry is the difference between the two bridge resistor values. A protective coating must cover the sensor die for use with saline and other fluids. 15 °C to 40 °C.
Pressure Range	-50 to 300	mmHg	Gage
Operating Temperature	50 to 122	°F	(10°C to 50°C)
Excitation	1 to 8	Volts	AC or DC
Zero Offset	±12.5	mV/V
Sensitivity	12 to 27	uV/V/mmHg	2
Linearity and Pressure Hysteresis	±2% of reading or ±1 mmHg whichever is larger	%FSO	3, 4
Temperature Coefficient of Zero	±40	μV/ V / °C	7
Temperature Coefficient of Zero Non-Linearity	±1.25	mmHg	7
Temperature Coefficient of Resistance	0.1	% /°C	Typical
Temperature Coefficient of Sensitivity	-0.2	%FSO/°C	Typical
Bridge Resistance	800 ± 20%	Ω
Symmetry	±5	%	5
Burst Pressure	4000	mmHg	Gage
Media Compatibility	Clean, dry, and non-corrosive gases		6

Part Number	Description
51564	2.5F, 300mmHg Gauge

NovaSensor P162